| Date | Owner | Type | Security | Price | Units | Value | |
|---|---|---|---|---|---|---|---|
| Dolan Robert VP of Wafer Technology | A | Common Stock | |||||
| Dolan Robert VP of Wafer Technology | S | Commom Stock | |||||
| Dolan Robert VP of Wafer Technology | S | Common Stock | |||||
| McKenna Charles M | A | Common Stock | |||||
| Marxe Austin W & Greenhouse David M | P | Common Stock |