| Date | Owner | Type | Security | Price | Units | Value | |
|---|---|---|---|---|---|---|---|
| Ludwig Michael M | M | Amtech Systems, Inc. $0.01 par value common stock | |||||
| Ludwig Michael M | M | Restricted Stock Units | |||||
| Jakwani Asif Y. | M | Amtech Systems, Inc. $0.01 par value common stock | |||||
| Jakwani Asif Y. | M | Restricted Stock Units | |||||
| Garnreiter Michael | M | Amtech Systems, Inc. $0.01 par value common stock |