| Date | Issuer | Type | Security | Price | Units | Value | |
|---|---|---|---|---|---|---|---|
| Axcelis Technologies Inc. EVP Global Operations | S | Common Stock | |||||
| Axcelis Technologies Inc. EVP Global Operations | F | Common Stock | |||||
| Axcelis Technologies Inc. EVP Global Operations | A | Common Stock | |||||
| Axcelis Technologies Inc. EVP Global Operations | F | Common Stock | |||||
| Axcelis Technologies Inc. EVP Global Operations | S | Common Stock |