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Axcelis Technologies Inc. – Material Contracts

NASDAQ: ACLS    
Share price (6/5/26): $147.16    
Market cap (6/5/26): $4.523 billion
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EX-10.8
from 10-K ~1 page Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 14, 2026
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EX-10.7
from 10-K ~5 pages Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 14, 2026
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EX-10.1
from 10-K 10 pages Axcelis Technologies, Inc. 2012 Equity Incentive Plan as Approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as Adjusted for the Reverse Stock Split on June 30, 2016; as Amended by the Board Of
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EX-10.1
from 8-K 10 pages Axcelis Technologies, Inc. 2012 Equity Incentive Plan
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EX-10.9
from 10-K ~1 page Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 15, 2025
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EX-10.8
from 10-K ~5 pages Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 15, 2025
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EX-10.1
from 10-K 10 pages Axcelis Technologies, Inc. 2012 Equity Incentive Plan
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EX-10.14
from 10-K 5 pages Axcelis Technologies, Inc. Executive Compensation Clawback Policy ​ as Adopted by the Board of Directors on August 10, 2023 ​
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EX-10.9
from 10-K ~1 page Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 15, 2024
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EX-10.8
from 10-K ~5 pages Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 15, 2024
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EX-10.1
from 8-K 8 pages Axcelis Technologies, Inc. Employment Agreement [Russell J. Low, PH.D.]
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EX-10.1
from 8-K 12 pages Axcelis Technologies, Inc. 2023 Amended and Restated Employment Agreement Mary G. Puma
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EX-10.15
from 10-K 3 pages Axcelis Technologies Inc. Executive Compensation Clawback Policy as Adopted by the Board of Directors on November 13, 2014
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EX-10.9
from 10-K ~1 page Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 15, 2023
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EX-10.8
from 10-K ~5 pages Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 15, 2023
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EX-10.1
from 10-Q 10 pages Axcelis Technologies, Inc. 2012 Equity Incentive Plan
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EX-10.1
from 10-Q 13 pages Axcelis Technologies, Inc. 2022 Amended and Restated Employment Agreement Mary G. Puma
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EX-10.9
from 10-K ~1 page Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 25, 2022
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EX-10.8
from 10-K ~5 pages Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 25, 2022
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EX-10.12
from 10-K ~1 page Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 26, 2021
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